Ultrasonic precision spraying machine is mainly for the first contact with ultrasonic spraying equipment for enterprises, colleges and universities and research institutes to develop the equipment. The structure of the whole equipment is simple and generous, full-featured, mainly including XYZ three-axis servo motion system and R-axis nozzle rotating mechanism, with a full-featured trajectory editing system, to achieve any two-dimensional plane graphics, such as rectangular, circular, triangular or curved spraying function. It can be equipped with any one of FUNSONIC's ultrasonic spray nozzles, as well as a precision constant-flow syringe pump, a digital display carrier gas system, an optional ultrasonic dispersing liquid supply system, and a vacuum adsorption and heating substrate. The whole equipment can also be placed in the fume hood.